Improving of positional uniformity in electrical property of ZnO based transparent conductive oxide

Presentation information

Poster presentation

21 Joint Session K » 21 Joint Session K (Poster)

Wed. Sep 19, 2018 4:00 PM - 6:00 PM PB (Shirotori Hall)

4:00 PM - 6:00 PM

〇Rei Sugiura¹, Motonari Shoriki¹, Shuhei Funaki¹, Yasuji Yamada¹ (1.Shimane Univ.)

Keywords:Zinc oxide, sputtering, annealing