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[20a-133-3] Estimation by multilayer perceptron of dislocation regions in photoluminescence image of multicrystalline silicon
Keywords:multilayer perceptron, dislocation, multicrystalline silicon
In this report, we studied a method based on multi-layer perceptron (MLP) to specify regions which were including dislocations in multicrystalline silicon wafers. Results of the cases changing input image sizes (input dimensions) of 1 wafer or 3wafers are reported.