[20a-234A-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20a-234A-6] Improvement of crystallinity of two types of non-polar ZnO thin films on sapphire substrate formed by mist-CVD

〇Yudai Tanaka¹, Hironobu Tanoue¹, Yuki Nagao¹, Takumi Furukawa¹, Shoji Nagaoka^3,4, Zenji Yatabe^1,2, Yusui Nakamura^1,4 (1.GSST Kumamoto Univ., 2.POIE Kumamoto Univ., 3.Kumamoto IRI, 4.Phoenics)

Keywords:ZnO, mist-CVD, crystallinity