[20a-437-1~11] 8.3 Plasma nanotechnology

△ [20a-437-4] Synthesis Test with Large Modulation of Lower-Coil Current using Tandem Type of Induction Thermal Plasmas

〇Kazuki Onda¹, Kotaro Shimizu¹, Naoto Kodama¹, Yosuke Ishisaka¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Tasuo Ishijima¹, Shiori Sueyasu², Shu Watanabe², Keitaro Nakamura² (1.Kanazawa Univ., 2.Nisshin Seifun Inc.)

Keywords:Inductively Coupled Thermal Plasma, Tandem Type, Si Nanoparticles

The authors have developed Tandem type of Modulated Induction Thermal Plasmas(Tandem-MITP) with two diffrerent coils and RF power supplies. Tandem-MITP with upper- and lower-coil current can provide temporally large varying high temperature field in the torch. In addition, tandem-MITP is more stable than single-coil MITP due to use two different coils. In this study, we attmepted that Si nanopatilces which are expected for next generation lithium ion battery was synthesized using tandem-MITP with lower-coil current amplitude modulation. As result of the nanoparticle synthesis, Si nanoparticels were succesfully synthesized. Furtheremore, to increase modulation degree of lower-coil current, very high production rate could be obtained.