[20a-437-1~11] 8.3 Plasma nanotechnology

[20a-437-8] Effects of precursors and catalysts on the plasma CVD synthesis of boron nitride

〇Tatsuya Shiratori¹, Takuya Takami¹, Takuya Miura¹, Takashi Yanase², Taro Nagahama², Yasunori Yamamoto², Toshihiro Shimada² (1.CSE Hokkaido Univ., 2.Eng. Hokkaido Univ.)

Keywords:boron nitride, plasma CVD

Boron nitride has h-BN, c-BN and the like which take graphite and diamond analog structures. In addition, synthesis of boron nitride nanotubes having a structure similar to that of carbon nanotubes has also been carried out, and applications are expected from properties such as excellent thermal conductivity and insulation properties. We focused on plasma CVD which can easily activate raw material gas, attempted synthesis of BN by plasma CVD using relatively safe borazine compound as a raw material, and searched for nanotube growth catalyst.