[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

△ [20a-438-1] Generation and analysis of ZnO nanoparticles using sputtering and laser

〇Wataru Wakaki¹, Akio Sanpei¹, Noriyuki Hasuike¹, Susumu Kamoi², Kenji Kisoda³ (1.Kyoto Ins. of Tech., 2.Kyoto Tech. Center, 3.Wakayama Univ.)

Keywords:Zinc Oxide, sputtering, laser

RF sputtering was performed using zinc oxide (ZnO) as a target, and ZnO nanoparticles were successfully formed by irradiating the laser during sputtering. The nanoparticles were not observed by ordinary sputtering, and the produced nanoparticles were observed by SEM and the particle size and number density were analyzed. In addition, the irradiation time dependence and wavelength dependence of laser in nanoparticles were measured and investigated.