[20a-PA3-1~3] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[20a-PA3-1] Low temperature deformation and pattern transfer of Ge single crystal by direct electric heating

〇Taiki Sakamoto¹, Kai Tokuhiro¹, Masahiro Shimizu¹, Yasuhiko Shimotsuma¹, Kiyotaka Miura¹, Satoru Hachinohe² (1.Kyoto Univ., 2.Proud Inc)

Keywords:germanium, deformation, spark plasma sintering

Normally, the spark plasma sintering (SPS) method is a technique used for sintering powder. But we treat the CZ - Si single crystal by the SPS method. By doing so, We succeeded in deforming Si in a short time while maintaining the transmittance. In this study, it was confirmed that the same group Ge can be deformed by using the same method, and the physical properties were measured using FT-IR and EBSD. Furthermore, attempts have been made to transfer a mold pattern to a Ge single crystal by SPS method using Si single crystal patterned on the surface using FIB as a mold.