9:30 AM - 11:30 AM
[20a-PA3-3] Development of a Chemical for Inhibiting Metal Contamination onto Wafers
Keywords:ultrapure water, polystyrene sulfonate, semiconductor
Presentation information
Poster presentation
13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
[20a-PA3-1~3] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)