Shigeyuki Hoshi

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[20a-PA3-1~3] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

9:30 AM - 11:30 AM

[20a-PA3-3] Development of a Chemical for Inhibiting Metal Contamination onto Wafers

〇Shigeyuki Hoshi¹, Toshimasa Katou¹, Takaaki Chuuman¹ (1.KWI Ltd.)