A study of PDA effect in High-k/GeO<sub>2</sub>/Ge structure

Presentation information

Poster presentation

13 Semiconductors » 13.3 Insulator technology

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

9:30 AM - 11:30 AM

〇Shotaro Wachi¹, Ryuichiro Watanabe¹, Yoshinori Kitahara¹, Yoshitaka Iwasaki¹, Koji Yamada¹, Tomo Ueno¹, Mitaro Namiki¹ (1.Tokyo Univ. of Agri&Tech)

Keywords:Ge, germanium