[20a-PA6-1~9] 15.7 Crystal characterization, impurities and crystal defects

△ [20a-PA6-3] Impact of Si (001) surface and SiO₂ film on the stability of metal atoms

〇(M1)Noriyuki Nonoda¹, Koji Sueoka² (1.Graduate School of Engineering, Okayama Pref. Univ., 2.Okayama Pref. Univ.)

Keywords:Si wafer, metal, First principles analysis