Fabrication of HfZrO<sub>2</sub> thin film from mixed precursor using MOCVD ... ... ...

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PB (Shirotori Hall)

9:30 AM - 11:30 AM

〇(M1)Genta Nakano¹, Takashi Nakajima^1,2, Yoichiro Hashizume¹, Soichiro Okamura¹ (1.Sci. Tokyo Univ. of Sci., 2.JST PRESTO)

Keywords:Ferroelectric, Hafnium Oxide, MOCVD

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