[20a-PB9-1~14] 6.2 Carbon-based thin films

△ [20a-PB9-1] DLC Protective Films for Suppressing of Bending-Press-Processing Damage

〇Toru Harigai¹, Yoda Fuminori¹, Satoshi Degai¹, Koki Tamekuni¹, Tsuyoshi Tanimoto¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Yoshihiro Asakura², Shigeki Takago³, Haruyuki Yasui³, Masao Kamiya⁴, Makoto Taki⁵ (1.Toyohashi Univ. Technol., 2.SP Works Co. Ltd., 3.Ind. Res. Inst. Ishikawa, 4.Itoh Opt. Ind. Co., Ltd., 5.Onward Ceram. Coat. Co. Ltd.)

Keywords:diamond-like carbon, protective film