[20p-143-1~12] 11.2 Thin and thick superconducting films, coated conductors and film crystal growth

△ [20p-143-1] Investigation of Thickening of SmBa₂Cu₃O_y Coated Conductors using Vapor-Liquid-Solid Growth Technique.

〇Tomohiro Ito¹, Yuji Tsuchiya¹, Yusuke Ichino¹, Yutaka Yoshida¹ (1.Nagoya Univ.)

Keywords:superconductivity, thin films

In order to apply REBa₂Cu₃O_y widely, it is necessary to suppress the fabrication cost of coated conductors. We aimed for cost reduction by fabricating coated conductors maintaining high deposition rate and high crystallinity using Vapor-Liquid-Solid growth technique. We achieved a deposition rate of 27.5 nm/sec, thickness of 1.7 µm, critical current density of 1.67 MA/cm^₂. Also, as a result of increasing the film thickness to 7.9 µm in order to achieve further I_c improvement, We succeeded in fabricating coated conductors maintaining high crystallinity.