[20p-222-1~23] 6.2 Carbon-based thin films

△ [20p-222-15] Damage Observation of DLC Films on Ultraviolet, Visible, and Near-Infrared Laser Irradiation

〇Satoshi Degai¹, Toru Harigai¹, Koki Tamekuni¹, Tsuyoshi Tanimoto¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Hidenobu Gonda², Masao Kamiya³, Makoto Taki⁴ (1.Toyohashi Univ. Technol., 2.OSG Coat.Service Co., Ltd., 3.Itoh Opt. Ind. Co., Ltd., 4.Onward Ceram. Coat. Co., Ltd.)

Keywords:DLC, Raman spectrometry, Laser irradiation

Diamond-like carbon (DLC) film is roughly divided into ta-C film and a-C film which are hydrogen free and have different hardness, ta-C:H film and a-C:H film which are containing hydrogen . Raman spectroscopic analysis is a major membrane evaluation method of DLC film. In Raman spectroscopic analysis, a characteristic Raman spectrum is obtained for each laser wavelength. However, the DLC film is damaged by laser irradiation. If membrane damage occurs, correct spectra can not be obtained. Therefore, in this study damage to the DLC film by laser irradiation was observed.