[20p-222-1~23] 6.2 Carbon-based thin films

△ [20p-222-14] Change in Structure of Diamond-Like Carbon Film by Annealing

〇Yuya Sugie¹, Tsuyoshi Tanimoto¹, Koki Tamekuni¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Tomoaki Kadoguchi¹, Shinsuke Kunitsugu², Masao Kamiya³, Makoto Taki⁴ (1.Toyohashi Univ. Technol., 2.Ind. Technol. Cent. of Okayama, 3.Itoh Opt. Ind. Co., Ltd., 4.Onward Ceram. Coat. Co., Ltd.)

Keywords:diamond-like carbon, heat resistance

In this study, the diamond-like carbon (DLC) membrane was vacuum heated, and the gas release and the membrane structure were analyzed accordingly.
Gas release and film structure change accompanying heating were measured using a thermal desorption spectrometry (TDS) analyzer and Raman spectroscopy. As a result of TDS analysis of the ta - C: H film, desorption of hydrogen was observed at around 600 ° C. to 750 ° C. In the Raman spectrum at the elevated temperature of 700 ° C., the progress of graphitization was suggested. The temperature at which the film structure change occurred coincided with the temperature at which hydrogen desorption appeared.