[20p-222-1~23] 6.2 Carbon-based thin films

[20p-222-13] Plasma Irradiation Effects on Diamond-like Carbon Films for Hydrophilic

〇(M1)Hiromi Kito¹, Masanori Hiratsuka³, Hideki Nakamori³, Akihiko Homma¹, Kenji Hirakuri², Yasuharu Ohgoe¹ (1.Dendai Univ., 2.Dendai Univ, 3.Nanotech Corp)

Keywords:Diamond-like Carbon

O₂ Plasma and atmospheric pressure Ar plasma were irradiated to DLC film formed variously on Si substrate, and the duration of hydrophilicity was analyzed from the change with time of contact angle and the change in surface composition after plasma irradiation.As a result, atmospheric pressure Ar plasma showed less change in contact angle and O - C = O which is an unstable group was formed after plasma irradiation. From the above analysis results, sustainability of imparting hydrophilicity by atmospheric pressure Ar plasma was confirmed.