The 79th JSAP Autumn Meeting, 2018

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-222-1~23] 6.2 Carbon-based thin films

Thu. Sep 20, 2018 1:15 PM - 7:30 PM 222 (222)

Masami Aono(National Defence Academy), Toru Harigai(Toyohashi Univ. of Tech.), Tokuyuki Teraji(NIMS), Yukako Kato(AIST)

5:45 PM - 6:00 PM

[20p-222-17] Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN induced by the microwave plasma of Ar

〇Chitose Sekizaki1, Fu Dong1, Hidetoshi Saitoh1, Haruhiko Ito1 (1.Nagaoka Univ of Tech)

Keywords:Carbon Nitride, Thin film