[20p-222-1~23] 6.2 Carbon-based thin films

[20p-222-9] Application of laser-induce doping in solutions containing dopant elements to diamond

〇Tsuyoshi Yoshitake¹, Eslam Abubakr^1,2, Abdelrahman Zkria^1,2, Yuki Katamune³, Shinya Ohmagari⁴, Hiroshi Ikenoue⁵ (1.Kyushu Univ. ASEM, 2.Aswan Univ., 3.Kyushu Inst. Techn., 4.AIST, 5.Kyushu Univ. GLP)

Keywords:diamond, doping, laser-induced doping

Laser-induce doping in solutions containing dopant elements is applied to singlecrystalline diamond. It certainly increased the electrical conductivity of the surface. Although the evidence of substitutional doping is not obtained, it should be applicable to facilitating the formation of Ohmic contacts between n-type/p-type diamond and metallic electrodes. This method has a potential for exploring new dopant elements that have not experimentally investigated due to difficulties in the doping during the deposition so far.