6:30 PM - 6:45 PM
[20p-223-11] Complex-formation reaction analysis for atomic-layer etching of metal surfaces
Keywords:Atomic layer etching
Symposium (Oral)
Symposium » Current status and future prospect of atomic layer processes
Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)
Makoto Sekine(Nagoya Univ.), Takeshi Momose(Univ. of Tokyo), Daisuke Hojo(AIST), Kazuhiro Karahashi(Osaka univ.)
6:30 PM - 6:45 PM
Keywords:Atomic layer etching