1:30 PM - 2:00 PM
▲ [20p-233-1] Imaging, Modification, and Analysis of Nanostructures with the Helium Ion Microscope
Keywords:Helium Ion Microscopy, Carbon Nanomembranes, Focussed Ion Beams
The presentation will review principles of HIM and contain examples of HIM imaging and lithography with a particular focus on 2D materials. 1 nm thick carbon nanomembranes (CNMs) with a controlled thickness and porosity are investigated. HIM images provide valuable information to understand the structure of CNMs and their formation. The capability of the HIM for nanolithography will be shown by milling of 2D materials, where nanopores with diameters down to 1.3 nm were fabricated. HIM imaging of different carbon materials from soot particles to biological cells will be presented and discussed.
 G. Hlawacek and A. Gölzhäuser (Ed.): Helium Ion Microscopy, Springer-International (2016).