[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

▲ [20p-233-10] Fabrication of optomechanical nanoresonators elastically coupled in series by focused-ion-beam for wavelength measurement

〇Kodai Tanaka¹, Shin'ichi Warisawa^1,2, Reo Kometani^1,2 (1.Grad. Sch. of Eng., Univ. of Tokyo, 2.Grad. Sch. of Front. Sci., Univ. of Tokyo)

Keywords:Focused-ion-beam, Resonator, Wavelength measurement

Nanomechanical resonators elastically coupled in series with half bull’s-eye structures were proposed for high resolution wavelength measurement. The device was fabricated by using focused-ion-beam (FIB). As a result nanomechanical resonators elastically coupled in series with half bull’s-eye structures are expected to achieve sensitive wavelength measurement.