[20p-233-1~10] ナノエレクトロニクス材料・デバイス研究開発を目指した先端イオン顕微鏡技術

▲ [20p-233-3] Graphene nanoelectromechanical (GNEM) devices functionalized by using helium ion beam for nanoscale thermal engineering

〇Hiroshi Mizuta^1,4、Mayeesha Hauqe¹、Seiya Kubo¹、Mikio Koyano¹、Yoshifumi Oshima¹、Manoharan Muruganathan¹、Yusuke Arashida²、Ikufumi Katayama²、Jun Takeda²、Shinichi Ogawa³、Marek Schmidt¹ (1.JAIST、2.YNU、3.AIST、4.Hitachi Cambridge Lab)

キーワード：graphene, phononic crystal, nanofabrication

We report on our recent progress of single-nanometer-scale patterning of suspended graphene structures by using focused helium ion beam of sub-1-nm in diameter and their applications to heat phonon engineering. We demonstrate the technique to fabricate graphene phononic crystals (GPnCs) with the two-dimensional array of 3-4 nm pores with the pitch down to 10 nm on multi-scale suspended graphene channels ranging from 100 nm to a few microns in length and width. We also briefly introduce simulation and characterization techniques for electronic and phonic states in GPnCs and discuss the possibility of GPnC-based thermal rectification devices.