4:45 PM - 5:15 PM
▲ [20p-233-8] NanoSIMS in Orion NanoFab
Keywords:Helium-Neon Ion Microscope, SIMS, Analytics
Unlike other sources used in commercially available SIMS systems, the small probe size of the He or Ne GFIS pushes the resolution to around 10 nm which is fundamentally limited by the ion - sample interaction and lateral collision cascade. We have demonstrated that our instrument is capable of producing elemental SIMS maps with lateral resolution down to 12 nm. Furthermore, the instruments opens up an in-situ correlative imaging technique combining high resolution SE images and SIMS elemental maps. Application of this technique to nanoparticles, microelectronics, battery materials, solar cells and various other fields will be highlighted in this work to elucidate the powerful correlative microscopy enabled by this integrated HIM-SIMS platform.