[20p-234B-1~17] 22.1 合同セッションM 「フォノンエンジニアリング」

▼ [20p-234B-2] Thermal properties of silicon phononic crystals with pacman holes

〇(P)Sergei Gluchko^1,2、Roman Anufriev¹、Ryoto Yanagisawa¹、Sebastian Volz^1,2、Masahiro Nomura¹ (1.IIS, Univ. of Tokyo、2.LIMMS Univ. of Tokyo)

キーワード：phononic crystal, thermal conductivity, silicon

We studied thermal properties of silicon based phononic crystlas with pacman shaped holes by means of micro time-domain thermoreflectance technique (µTDTR). Experimental demonstration of both phonon scattering and phonon transmission through narrow necks was investigated at different tempearatures. We have also investigated the effect of the orientation of asymmetric holes and their filling factors. Our results open new possibilities for thermoelectric devices engineering and manipulating heat at nanoscale.