[20p-PA5-1~11] 8.1 Plasma production and diagnostics

[20p-PA5-10] Macro-pulse design and optical emission spectroscopy for plasma generated by high-power pulsed magnetron sputtering using modulated pulsed power system

〇(B)Yuki Nakagomi¹, Hiroshi Nishida¹, Yoshihiro Hirai¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

Keywords:magnetron sputtering, plasma diagnostics, optical measurement

Recently high power pulsed magnetron sputtering (HPPMS) which generate high energy particles and multiple charged ions has attracted a lot of attention and is studied and developed for a new hard coating technology on cutting tools. The optical emission spectroscopy for plasma generated by high power pulsed magnetron sputtering using modulated pulsed powers (MPP) designed with micro pulses will be discussed in this presentation.