Yuki Nakagomi

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 4:00 PM - 6:00 PM PA (Event Hall)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20p-PA5-1~11] 8.1 Plasma production and diagnostics

4:00 PM - 6:00 PM

[20p-PA5-10] Macro-pulse design and optical emission spectroscopy for plasma generated by high-power pulsed magnetron sputtering using modulated pulsed power system

〇(B)Yuki Nakagomi¹, Hiroshi Nishida¹, Yoshihiro Hirai¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

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