[20p-PA5-1~11] 8.1 Plasma production and diagnostics

[20p-PA5-9] Excitation temperatures of emitting species in plasma generated by
high-power pulsed magnetron sputtering (HPPMS)

〇(M1)Hiroshi Nishida¹, Yoshihiro Hirai¹, Yuki Nakagomi¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

Keywords:magnetron sputtering, plasma diagnostics, optical measurement

In recent years, it has been intensely studied on the composition analysis and the spectroscopic analysis for the plasma emissions generated by high-power pulsed magnetron sputtering (HPPMS).
In this study, the excitation temperatures, which are the indexes of the excitation level distributions for the light-emitting species, have been estimated from the emission spectra of atoms and their ions, and the atom-ion process will be investigated with based on the excitation temperatures.