[21a-135-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21a-135-10] Temperature control of clean room by dynamic simulation and virtual metrology

〇Haruki Kai¹, Abe Narumi¹, Kumagae Yuki¹, Iwamura Ko², Kubota Hiroshi¹, Hashishin Takeshi¹, Yoshioka Masao² (1.GSST Kumamoto Univ., 2.Kumamoto Univ.)

Keywords:semiconductor, simulation