The 79th JSAP Autumn Meeting, 2018

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21a-135-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Fri. Sep 21, 2018 9:00 AM - 11:45 AM 135 (135)

Nobuya Mori(Osaka Univ.)

9:30 AM - 9:45 AM

△ [21a-135-3] Chemical potential dependence of defect species at Si(001)/SiO2 interface

〇Hiroki Kawai1, Yasushi Nakasaki1, Takahisa Kanemura1, Takamitsu Ishihara1 (1.Toshiba Memory Corp.)

Keywords:Density functional theory, Silicon device, Defect