[21a-141-1~13] 15.6 Group IV Compound Semiconductors (SiC)

[21a-141-11] Optically Detected Magnetic Resonance Measurements of Silicon Vacancy Created in SiC pn Junction Diodes by Proton Beam Writing

〇(M1)Yoji Chiba^1,2, Yuichi Yamazaki², Takahiro Makino², Shin-ichiro Sato², Naoto Yamada², Takahiro Satoh², Kazutoshi Kojima³, Yasuto Hijikata¹, Takeshi Ohshina² (1.Saitama Univ., 2.QST, 3.AIST)

Keywords:single photon sources, point defects, ODMR