[21a-222-1~11] 6.3 Oxide electronics

△ [21a-222-2] Observation of Giant Isotope Effects Induced by Deuterium Ion beam Irradiation of Zinc Oxide Thin Films

〇Ryo Nakayama¹, Mitsuhiko Maesato², Makoto Arita³, Hiroshi Nakanishi^4,5, Hiroshi Kitagawa² (1.Tokyo Tech., 2.Kyoto Univ., 3.Kyushu Univ., 4.Nat. Inst. Tech., Akashi College, 5.Oska Univ.)

Keywords:zinc oxide, hydrogen, thin film

Hydrogen introduction is a powerful method to control physical properties of materials. However, conventional methods are available to a few materials and need very long time to introduce much hydrogen. Now we focus on hydrogen ion beam irradiation as an efficient way of hydrogen introduction. In this study, we investigated isotope effects on ZnO thin films irradiated with hydrogen or deuterium ion beam using in situ conductivity measurement.