[21p-135-1~16] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21p-135-16] Water Flow Recirculation Design in Batch-Type Silicon Wafer Wet Cleaner

〇Miya Matsuo¹, Kento Miyazaki¹, Shogo Okuyama¹, Hitoshi Habuka¹, Akihiro Goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)

Keywords:Wet cleaning, Water flow, Design

In batch-type silicon wafer wet cleaner, we installed some pin holes near the upper end of the wet cleaner wall to suppress the water flow recirculation. The water flow in the wet cleaner were analyzed using the numerical calculation.