The 79th JSAP Autumn Meeting, 2018

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[21p-145-1~14] 13.3 Insulator technology

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Keisuke Yamamoto(Kyushu Univ.), Yasushi Hotta(Univ. of Hyogo)

4:30 PM - 4:45 PM

[21p-145-13] Charge and discharge characteristics of MIM capacitors with CeOx layer

Kohei Sasa1, Kazuya Hisatsune1, Takuya Hoshii1, Iriya Muneta1, Hitoshi Wakabayashi1, Kazuo Tsutsui1, Kuniyuki Kakushima1 (1.Tokyo Inst.)

Keywords:cerium oxide