The 79th JSAP Autumn Meeting, 2018

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[21p-145-1~14] 13.3 Insulator technology

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Keisuke Yamamoto(Kyushu Univ.), Yasushi Hotta(Univ. of Hyogo)

2:00 PM - 2:15 PM

[21p-145-4] Fabrication of Y-Oxide Gate Stack on Ge by using Electron Beam Evaporation

〇Kentaro Akiyama1, Kento Iseri1, Wei-Chen Wen1, Keisuke Yamamoto1, Dong Wang1, Hiroshi Nakashima2 (1.IGSES, Kyushu Univ., 2.GIC, Kyushu Univ.)

Keywords:semiconductor