The 79th JSAP Autumn Meeting, 2018

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[21p-222-1~8] 7.5 Ion beams

Fri. Sep 21, 2018 1:15 PM - 3:15 PM 222 (222)

Noriaki Toyoda(Univ. of Hyogo), Yasuhito Gotoh(Kyoto Univ.)

2:15 PM - 2:30 PM

[21p-222-5] Improvement in the Detection Sensitivity of Secondary Ions by Cs Absorption with the Mist Deposition Method on a PEG Surface

Taiki Matsuda1, Jiro Matsuo1, Toshio Seki1, Takaaki Aoki2 (1.Graduate School of Engineering, Kyoto Univ, 2.ACCMS, Kyoto Univ)

Keywords:SIMS, Cs