[21p-222-1~8] 7.5 Ion beams

[21p-222-4] Application of image processing technique for imaging SIMS analysis

〇Takaaki Aoki¹, Toshio Seki², Jiro Matsuo² (1.ACCMS, Kyoto Univ., 2.Grad. School. Eng., Kyoto Univ.)

Keywords:SIMS, image processing

SIMS is one of powerful method to obtain high resolution mass distribution. However, it still be difficult to identfiy the original material components like bio materials, because it may have complicated material structure as well as each component molecule has gives variety of moecular fragments. In this study, we adopt image processing technique for imaging SIMS spectrum data, which provides not only mass but also spacial information, in order to achive advanced SIMS data analysis.