The 79th JSAP Autumn Meeting, 2018

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[21p-232-1~18] 6.2 Carbon-based thin films

Fri. Sep 21, 2018 1:15 PM - 6:00 PM 232 (232)

Norio Tokuda(Kanazawa Univ.), Mariko Suzuki(CORNES Technologies Ltd.), Daisuke Takeuchi(AIST), Hisao Miyazaki(Toshiba)

1:45 PM - 2:00 PM

[21p-232-3] Electrical Properties of Heteroepitaxial Diamond with Chemical Mechanical Planarization

〇Yutaka Kimura1, Seong-Woo Kim1, Satoshi Masuya2, Koki Oyama1, Kenjiro Ikejiri1, Makoto Kasu2 (1.Adamant Namiki Precision Jewel, 2.Saga Univ)

Keywords:diamond, chemical mechanical planarization