[21p-PB3-1~5] 13.5 Semiconductor devices and related technologies

[21p-PB3-2] Multi layered metal nanoparticles embedded V-groove Junctionless-FET

〇Takahiko Ban¹, Shinji Migita², Mutsunori Uenuma³, Yasuaki Ishikawa³, Ichiro Yamashita³, Yukiharu Uraoka³, Shin-ichi Yamamoto¹ (1.Ryukoku Univ., 2.AIST, 3.NAIST)

Keywords:Floating gate memory, nanoparticle