Hakaru Mizoguchi

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:15 PM - 6:00 PM A404 (54-404)

Symposium (Oral)
| Symposium
| Progress in studies on mterial conversion and processing with high-power lasers

[18p-A404-1~12] Progress in studies on mterial conversion and processing with high-power lasers

3:00 PM - 3:30 PM

[18p-A404-5] High Power LPP-EUV Source with Long Collector Mirror Lifetime
for High Volume Semiconductor Manufacturing

〇Hakaru Mizoguchi¹, Takashi Saitou¹, Taku Yamazaki¹ (1.Gigaphoton Inc.)