Masato Uehara

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P6 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[19p-P6-1~17] 6.4 Thin films and New materials

1:30 PM - 3:30 PM

[19p-P6-5] Influence of Elements Addition on Crystal Structure of AlN Piezoelectric Thin Film

Saki Tanaka², 〇Masato Uehara^1,2, Sri Ayu Anggraini¹, Tetsuya Okuyama³, Hiroshi Yamada^1,2, Morito Akiyama¹ (1.AIST, 2.Kyushu Univ., 3.Kurume NCT)