Kodai Tanaka

→ Search for Kodai Tanaka in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-C101-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:15 AM - 9:30 AM

△ [19a-C101-1] Highy sensitive thermal stress detection using elastically center coupled nanomechanical resonator

〇Kodai Tanaka¹, Etsuo Maeda¹, Shin-ichi Warisawa^1,2, Reo Kometani^1,2 (1.Grad. Sch. of Eng., Univ. of Tokyo, 2.Grad. Sch. of Front. Sci., Univ. of Tokyo)

▲