Kazuki Shida

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:45 AM - 12:00 PM F214 (61-214)

Oral presentation
| 15 Crystal Engineering
| 15.5 Group IV crystals and alloys

[20a-F214-1~9] 15.5 Group IV crystals and alloys

11:30 AM - 11:45 AM

△ [20a-F214-8] Tomographic Analysis of Lattice Plane Microstructure in the Depth Direction of High-Ge-Content SiGe Films with Compositionally Graded Layers Using Nanobeam X-Ray Diffraction

〇Kazuki Shida¹, Shotaro Takeuchi¹, Tetsuya Tohei¹, Yasuhiko Imai², Shigeru Kimura², Andreas Schulze³, Matty Caymax³, Akira Sakai¹ (1.Osaka Univ., 2.JASRI, 3.imec)

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