Keiko Masumoto

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:30 PM - 6:00 PM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[19p-D103-1~17] 15.6 Group IV Compound Semiconductors (SiC)

2:45 PM - 3:00 PM

△ [19p-D103-6] Growth and warpage reduction of thick 4H-SiC epitaxial layers

〇Keiko Masumoto¹, Satoshi Segawa^1,2, Toshiyuki Ohno³, Shingo Saito¹, Kazutoshi Kojima¹, Tomohisa Kato¹, Hajime Okumura¹ (1.AIST, 2.Asahi Diamond, 3.Hitachi)

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