Kota Uzaki

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[17p-P12-1~27] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[17p-P12-3] Influence on the surface roughness of GaN by ICP-RIE using Cl2 and BCl3

〇Kota Uzaki¹, Go Imakuma¹, Satoko Shinkai² (1.Kyutech, 2.CMS)