Katsuyuki Machida

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 6:30 PM G201 (63-201)

Special Symposium
| Special Symposium
| SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

[18p-G201-1~16] SP6 The Progress and Prospect of the Integrated MEMS (10th Anniversary Symposium of the Study Group of the Integrated MEMS)

3:30 PM - 3:45 PM

[18p-G201-6] Challenges and Prospects of Integrated CMOS-MEMS Technology

〇Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Inst. of Tech.)