Yuka Endo

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 5:00 PM C104 (52-104)

Symposium (Oral)
| Symposium
| Fundamentals and applications of piezoelectric thin-film devices

[18p-C104-1~9] Fundamentals and applications of piezoelectric thin-film devices

4:15 PM - 4:30 PM

△ [18p-C104-7] ScAl alloy spattering target for ScAlN thin film growth synthesized by e-beam vacuum melting

〇Yuka Endo¹, Kohei Sano¹, Rei Karasawa¹, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.JST PRESTO, 3.ZAIKEN)