Masanori Koyama

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 10:30 AM - 12:00 PM B401 (53-401)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-B401-1~6] 7.3 Micro/Nano patterning and fabrication

11:00 AM - 11:15 AM

[20a-B401-3] Stochastic Simulation of Pattern Formation in Electron Beam Lithography

〇Masanori Koyama¹, Masamitsu Shirai¹, Hiroaki Kawata¹, Yoshihiko Hirai¹, Masaaki Yasuda¹ (1.Osaka Pref. Univ.)