Akira Sasaki

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:15 PM - 4:45 PM B301 (53-301)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[20p-B301-1~13] 7.1 X-ray technologies

3:30 PM - 3:45 PM

[20p-B301-9] Stochastic modeling of resists in EUV lithography

〇Akira Sasaki¹, Ishino Masahiko¹, Nishikino Masaharu¹, Maekawa Yasunari¹ (1.QST)