Masaki Yamamoto

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-C101-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:15 AM - 11:30 AM

[19a-C101-9] SiC Nanodots Formation in Bulk-Si using Hot C+ Ion Implantation Substrate (Ⅲ):C Dose Dependency

Sho Irie¹, 〇Masaki Yamamoto¹, Sinji Nakada¹, Yusuke Omata¹, Takashi Aoki¹, Toshiyuki Sameshima², Tomohisa Mizuno¹ (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)

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